Electrical detection of multiple resonant modes in a CMOS-MEMS cantilever

A. Uranga; J. Verd; F. Torres; J. Teva; J. L. López; G. Abadal; J. Esteve; F. Pérez-Murano; N. Barniol

doi:10.1016/j.mee.2007.01.114

Electrical detection of multiple resonant modes in a CMOS-MEMS cantilever

A. Uranga^*, J. Verd, F. Torres, J. Teva, J. L. López, G. Abadal, J. Esteve, F. Pérez-Murano, N. Barniol

^*Autor corresponent d’aquest treball

Producció científica: Contribució a revista › Article › Recerca › Avaluat per experts

6 Cites (Scopus)

Resum

El disseny, implementació i prova d'un ressonador mecànic CMOS integrat monolíticament basat en un cantiléver metàl·lic es presenten. Diversos modes de ressonància incloent el fonamental i el primer mode superior s'han caracteritzat elèctricament amb els circuits CMOS integrats. Resultats del test: mesures dels modes laterals i verticals de vibració del cantiléver metàl·lic. Els modes de ressonància experimentals trobats han estat corroborats per simulacions mitjançant el mètode d'elements finits (FEM).

Idioma original	Anglès
Pàgines (de-a)	1374-1378
Nombre de pàgines	5
Revista	Microelectronic Engineering
Volum	84
Número	5-8
DOIs	https://doi.org/10.1016/j.mee.2007.01.114
Estat de la publicació	Publicada - de maig 2007

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@article{34e45be466fc47159f31e74177f764c3,

title = "Electrical detection of multiple resonant modes in a CMOS-MEMS cantilever",

abstract = "The design, implementation and test of a monolithically integrated CMOS-mechanical resonator based on a metal cantilever are presented. Several resonant modes including fundamental and first higher mode have been electrically characterized with the embedded CMOS circuitry. Test results provide measures of both lateral and vertical modes of vibration of the metal cantilever. The experimental resonant modes found have been corroborated by finite element method (FEM) simulations.",

keywords = "Cantilever-based-sensors, CMOS-MEMS, Resonant cantilever",

author = "A. Uranga and J. Verd and F. Torres and J. Teva and L{\'o}pez, \{J. L.\} and G. Abadal and J. Esteve and F. P{\'e}rez-Murano and N. Barniol",

year = "2007",

month = may,

doi = "10.1016/j.mee.2007.01.114",

language = "English",

volume = "84",

pages = "1374--1378",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

number = "5-8",

}

TY - JOUR

T1 - Electrical detection of multiple resonant modes in a CMOS-MEMS cantilever

AU - Uranga, A.

AU - Verd, J.

AU - Torres, F.

AU - Teva, J.

AU - López, J. L.

AU - Abadal, G.

AU - Esteve, J.

AU - Pérez-Murano, F.

AU - Barniol, N.

PY - 2007/5

Y1 - 2007/5

N2 - The design, implementation and test of a monolithically integrated CMOS-mechanical resonator based on a metal cantilever are presented. Several resonant modes including fundamental and first higher mode have been electrically characterized with the embedded CMOS circuitry. Test results provide measures of both lateral and vertical modes of vibration of the metal cantilever. The experimental resonant modes found have been corroborated by finite element method (FEM) simulations.

AB - The design, implementation and test of a monolithically integrated CMOS-mechanical resonator based on a metal cantilever are presented. Several resonant modes including fundamental and first higher mode have been electrically characterized with the embedded CMOS circuitry. Test results provide measures of both lateral and vertical modes of vibration of the metal cantilever. The experimental resonant modes found have been corroborated by finite element method (FEM) simulations.

KW - Cantilever-based-sensors

KW - CMOS-MEMS

KW - Resonant cantilever

UR - https://www.scopus.com/pages/publications/34247556011

U2 - 10.1016/j.mee.2007.01.114

DO - 10.1016/j.mee.2007.01.114

M3 - Article

AN - SCOPUS:34247556011

SN - 0167-9317

VL - 84

SP - 1374

EP - 1378

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 5-8

ER -

Electrical detection of multiple resonant modes in a CMOS-MEMS cantilever

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