Effect of Silicon Oxide, Silicon Nitride and Polysilicon Layers on the Electrostatic Pressure during the Anodic Bonding

J.A. Plaza, J. Esteve, E. Lora-Tamayo

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title = "Effect of Silicon Oxide, Silicon Nitride and Polysilicon Layers on the Electrostatic Pressure during the Anodic Bonding",

author = "J.A. Plaza and J. Esteve and E. Lora-Tamayo",

year = "1998",

month = jan,

day = "1",

language = "English",

volume = "67",

pages = "181--184",

number = "1-3",

}

TY - JOUR

T1 - Effect of Silicon Oxide, Silicon Nitride and Polysilicon Layers on the Electrostatic Pressure during the Anodic Bonding

AU - Plaza, J.A.

AU - Esteve, J.

AU - Lora-Tamayo, E.

PY - 1998/1/1

Y1 - 1998/1/1

UR - https://www.scopus.com/pages/publications/0043286543

M3 - Article

SN - 0924-4247

VL - 67

SP - 181

EP - 184

JO - Sens. actuators, A, Phys.

JF - Sens. actuators, A, Phys.

IS - 1-3

ER -