Detection of low NO₂ concentrations with low power micromachined tin oxide gas sensors

Keyphrases

• Low Power 100%
• Micromachining 100%
• NO2 Concentration 100%
• Tin Oxide 100%
• Oxide Gas Sensor 100%
• Actuator 33%
• Power Consumption 33%
• Processing Stages 33%
• Silicon Substrate 33%
• Polysilicon 33%
• On-chip Devices 33%
• Solid State 33%
• IC Manufacturing 33%
• Silicon Nitride 33%
• Active Area 33%
• Good Isolation 33%
• Excellent Sensitivity 33%
• Operating Temperature 33%
• Short Response Time 33%
• Aromatic Hydrocarbons 33%
• Reactive Sputtering 33%
• Technological Processing 33%
• Semiconductor Gas Sensor 33%
• Sputtering Method 33%
• Thin Film Thickness 33%
• Cane 33%
• Isolated Structure 33%
• Integrated Gas Sensor 33%
• Hydrocarbon Sensor 33%
• FEM Thermal Simulation 33%
• Heating Material 33%
• LoRa 33%

Engineering

• Gas Sensor 100%
• Electric Power Utilization 33%
• Aromatics 33%
• Silicon Substrate 33%
• Chip Device 33%
• Processing Step 33%
• Active Area 33%
• Nitride 33%
• Thin Films 33%
• Response Time 33%
• Thermal Simulation 33%
• Reactive Sputtering 33%
• Operating Temperature 33%
• Polysilicon 33%
• Actuator 33%

Material Science

• Gas Sensor 100%
• Tin Oxide 100%
• Nitrogen Dioxide 100%
• Film Thickness 33%
• Silicon Nitride 33%
• Actuator 33%
• Silicon 33%
• Thin Films 33%