Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit

Jaume Verd, Gabriel Abadal, J. Teva, María Villarroya Gaudó, Arantxa Uranga, Xavier Borrisé, Francesca Campabadal, Jaume Esteve, Eduardo Figueras Costa, Francesc Pérez-Murano, Zachary J. Davis, Esko Forsén, Anja Boisen, Nuria Barniol