TY - JOUR
T1 - Design and control of a micro-cantilever tool for micro-robot contact sensing
AU - Arbat, A.
AU - Canals, J.
AU - Casanova, R.
AU - Diéguez, A.
AU - Brufau, J.
AU - Puig, M.
AU - Samitier, J.
PY - 2007
Y1 - 2007
N2 - This paper presents the electronics for the resonance control of a resonance contact sensor. The interface consists in an analog front-end and a digital control unit, fabricated in a CMOS standard technology of 0.13 μm from STM. The sensor is a SMART multi-layer piezo-polymer micro-cantilever working in resonance mode. The sensing is done using an electrical isolated piezo-layer of the microstructure. For the design of the electronics an electrical model of the sensor has been developed. The model is described in detail in the paper.
AB - This paper presents the electronics for the resonance control of a resonance contact sensor. The interface consists in an analog front-end and a digital control unit, fabricated in a CMOS standard technology of 0.13 μm from STM. The sensor is a SMART multi-layer piezo-polymer micro-cantilever working in resonance mode. The sensing is done using an electrical isolated piezo-layer of the microstructure. For the design of the electronics an electrical model of the sensor has been developed. The model is described in detail in the paper.
UR - http://www.scopus.com/inward/record.url?scp=49749139683&partnerID=8YFLogxK
U2 - 10.1109/ECCTD.2007.4529546
DO - 10.1109/ECCTD.2007.4529546
M3 - Article
AN - SCOPUS:49749139683
SP - 100
EP - 103
JO - European Conference on Circuit Theory and Design 2007, ECCTD 2007
JF - European Conference on Circuit Theory and Design 2007, ECCTD 2007
M1 - 4529546
ER -