Design and control of a micro-cantilever tool for micro-robot contact sensing

A. Arbat*, J. Canals, R. Casanova, A. Diéguez, J. Brufau, M. Puig, J. Samitier

*Autor corresponent d’aquest treball

Producció científica: Contribució a revistaArticleRecercaAvaluat per experts

4 Cites (Scopus)

Resum

This paper presents the electronics for the resonance control of a resonance contact sensor. The interface consists in an analog front-end and a digital control unit, fabricated in a CMOS standard technology of 0.13 μm from STM. The sensor is a SMART multi-layer piezo-polymer micro-cantilever working in resonance mode. The sensing is done using an electrical isolated piezo-layer of the microstructure. For the design of the electronics an electrical model of the sensor has been developed. The model is described in detail in the paper.
Idioma originalAnglès
Número d’article4529546
Pàgines (de-a)100-103
Nombre de pàgines4
RevistaEuropean Conference on Circuit Theory and Design 2007, ECCTD 2007
DOIs
Estat de la publicacióPublicada - 2007

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