Cross Coupled beams CMOS-MEMS resonator for VHF range with enhanced electrostatic detection

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Idioma original	Anglès
Pàgines (de-a)	2325- 2329
Revista	Microelectronic Engineering
Volum	88
Número	8
DOIs	https://doi.org/10.1016/j.mee.2011.02.100
Estat de la publicació	Publicada - 1 de gen. 2011

Accés al document

@article{50c8de337abc4369b74116d724fcff73,

title = "Cross Coupled beams CMOS-MEMS resonator for VHF range with enhanced electrostatic detection",

author = "E. Marig{\'o} and J.L. Mu{\~n}oz-Gamarra and G. Vidal and J. Giner and F. Torres and A. Uranga and N. Barniol",

year = "2011",

month = jan,

day = "1",

doi = "10.1016/j.mee.2011.02.100",

language = "English",

volume = "88",

pages = "2325-- 2329",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

number = "8",

}

TY - JOUR

T1 - Cross Coupled beams CMOS-MEMS resonator for VHF range with enhanced electrostatic detection

AU - Marigó, E.

AU - Muñoz-Gamarra, J.L.

AU - Vidal, G.

AU - Giner, J.

AU - Torres, F.

AU - Uranga, A.

AU - Barniol, N.

PY - 2011/1/1

Y1 - 2011/1/1

UR - https://www.scopus.com/pages/publications/79960067817

U2 - 10.1016/j.mee.2011.02.100

DO - 10.1016/j.mee.2011.02.100

M3 - Article

SN - 0167-9317

VL - 88

SP - 2325

EP - 2329

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 8

ER -