Confocal Raman Microprobe of Lattice Damage in N+ Implanted 6H-SiC

Confocal Raman Microprobe of Lattice Damage in N⁺ Implanted 6H-SiC

N. Mestres, F. Alsina, F.J. Campos, J. Pascual, E. Morvan, P. Godignon, J. Millán

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@article{11c1258fb61b463b8602c59c1e98da15,

title = "Confocal Raman Microprobe of Lattice Damage in N+ Implanted 6H-SiC",

author = "N. Mestres and F. Alsina and F.J. Campos and J. Pascual and E. Morvan and P. Godignon and J. Mill{\'a}n",

year = "2000",

month = jan,

day = "1",

language = "English",

volume = "338",

pages = "663--666",

journal = "Mat. sci. forum",

issn = "0255-5476",

number = "3",

}