Confocal Micro-Raman Scattering and Rutherford Backscattering Characterization of Lattice Damage in Aluminium Implanted 6H-SiC

F.J. Campos; N. Mestres; F. Alsina; J. Pascual; E. Morvan; P. Godignon; J. Millán

doi:10.1016/S0925-9635(98)00275-1

Confocal Micro-Raman Scattering and Rutherford Backscattering Characterization of Lattice Damage in Aluminium Implanted 6H-SiC

F.J. Campos, N. Mestres, F. Alsina, J. Pascual, E. Morvan, P. Godignon, J. Millán

Departament de Física

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7 Cites (Scopus)

Idioma original	Anglès
Pàgines (de-a)	357-360
Revista	Diamond and Related Materials
Volum	8
Número	2-5
DOIs	https://doi.org/10.1016/S0925-9635(98)00275-1
Estat de la publicació	Publicada - 1 de març 1999

Accés al document

10.1016/S0925-9635(98)00275-1

Altres arxius i enllaços

https://www.scopus.com/pages/publications/0039776417

Com citar-ho

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title = "Confocal Micro-Raman Scattering and Rutherford Backscattering Characterization of Lattice Damage in Aluminium Implanted 6H-SiC",

author = "F.J. Campos and N. Mestres and F. Alsina and J. Pascual and E. Morvan and P. Godignon and J. Mill{\'a}n",

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T1 - Confocal Micro-Raman Scattering and Rutherford Backscattering Characterization of Lattice Damage in Aluminium Implanted 6H-SiC

AU - Campos, F.J.

AU - Mestres, N.

AU - Alsina, F.

AU - Pascual, J.

AU - Morvan, E.

AU - Godignon, P.

AU - Millán, J.

PY - 1999/3/1

Y1 - 1999/3/1

UR - https://www.scopus.com/pages/publications/0039776417

U2 - 10.1016/S0925-9635(98)00275-1

DO - 10.1016/S0925-9635(98)00275-1

M3 - Article

SN - 0925-9635

VL - 8

SP - 357

EP - 360

JO - Diamond and Related Materials

JF - Diamond and Related Materials

IS - 2-5

ER -