CMOS-MEMS resonators: From devices to applications

A. Uranga; J. Verd; N. Barniol

doi:10.1016/j.mee.2014.08.015

CMOS-MEMS resonators: From devices to applications

A. Uranga, J. Verd, N. Barniol

Departament d'Enginyeria Electrònica

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92 Cites (Scopus)

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© 2014 Elsevier B.V. All rights reserved. This review summarizes the reported MEMS resonators integrated monolithically in CMOS technology and their main applications as oscillator circuits in timing applications and in sensory systems. An overview of the CMOS-MEMS resonators acting as filters for signal processing is also included. Special emphasis will be given to the different technological fabrication approaches and their performance, providing specific figures of merit for their comparison as stand-alone resonator as well as oscillator and filter. This review contributes to establish the state-of-the art on CMOS-MEMS resonators.

Idioma original	Anglès
Pàgines (de-a)	58-73
Revista	Microelectronic Engineering
Volum	132
DOIs	https://doi.org/10.1016/j.mee.2014.08.015
Estat de la publicació	Publicada - 25 de gen. 2015

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10.1016/j.mee.2014.08.015

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title = "CMOS-MEMS resonators: From devices to applications",

abstract = "{\textcopyright} 2014 Elsevier B.V. All rights reserved. This review summarizes the reported MEMS resonators integrated monolithically in CMOS technology and their main applications as oscillator circuits in timing applications and in sensory systems. An overview of the CMOS-MEMS resonators acting as filters for signal processing is also included. Special emphasis will be given to the different technological fabrication approaches and their performance, providing specific figures of merit for their comparison as stand-alone resonator as well as oscillator and filter. This review contributes to establish the state-of-the art on CMOS-MEMS resonators.",

keywords = "CMOS-MEMS, MEMS, Oscillators, Resonators, RF-MEMS",

author = "A. Uranga and J. Verd and N. Barniol",

year = "2015",

month = jan,

day = "25",

doi = "10.1016/j.mee.2014.08.015",

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journal = "Microelectronic Engineering",

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T1 - CMOS-MEMS resonators: From devices to applications

AU - Uranga, A.

AU - Verd, J.

AU - Barniol, N.

PY - 2015/1/25

Y1 - 2015/1/25

N2 - © 2014 Elsevier B.V. All rights reserved. This review summarizes the reported MEMS resonators integrated monolithically in CMOS technology and their main applications as oscillator circuits in timing applications and in sensory systems. An overview of the CMOS-MEMS resonators acting as filters for signal processing is also included. Special emphasis will be given to the different technological fabrication approaches and their performance, providing specific figures of merit for their comparison as stand-alone resonator as well as oscillator and filter. This review contributes to establish the state-of-the art on CMOS-MEMS resonators.

AB - © 2014 Elsevier B.V. All rights reserved. This review summarizes the reported MEMS resonators integrated monolithically in CMOS technology and their main applications as oscillator circuits in timing applications and in sensory systems. An overview of the CMOS-MEMS resonators acting as filters for signal processing is also included. Special emphasis will be given to the different technological fabrication approaches and their performance, providing specific figures of merit for their comparison as stand-alone resonator as well as oscillator and filter. This review contributes to establish the state-of-the art on CMOS-MEMS resonators.

KW - CMOS-MEMS

KW - MEMS

KW - Oscillators

KW - Resonators

KW - RF-MEMS

U2 - 10.1016/j.mee.2014.08.015

DO - 10.1016/j.mee.2014.08.015

M3 - Review article

SN - 0167-9317

VL - 132

SP - 58

EP - 73

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -

CMOS-MEMS resonators: From devices to applications

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