Cancellation of the Parasitic Feedthrough Current in an Integrated CMOS-MEMS Clamped- Clamped Beam Resonator

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Idioma original	Anglès
Pàgines (de-a)	599-602
Revista	Microelectronic Engineering
Volum	98
DOIs	https://doi.org/10.1016/j.mee.2012.05.062
Estat de la publicació	Publicada - 1 de gen. 2012

Accés al document

@article{4a340fe0539e4ff597214e6c89985ebf,

title = "Cancellation of the Parasitic Feedthrough Current in an Integrated CMOS-MEMS Clamped- Clamped Beam Resonator",

author = "{J. Giner}, {A. Uranga} and N. Barniol",

year = "2012",

month = jan,

day = "1",

doi = "10.1016/j.mee.2012.05.062",

language = "English",

volume = "98",

pages = "599--602",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}

TY - JOUR

T1 - Cancellation of the Parasitic Feedthrough Current in an Integrated CMOS-MEMS Clamped- Clamped Beam Resonator

AU - J. Giner, A. Uranga

AU - Barniol, N.

PY - 2012/1/1

Y1 - 2012/1/1

U2 - 10.1016/j.mee.2012.05.062

DO - 10.1016/j.mee.2012.05.062

M3 - Article

SN - 0167-9317

VL - 98

SP - 599

EP - 602

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -