Application of the Clustering Model to Time-Correlated Oxide Breakdown Events in Multilevel Antifuse Memory Cells

Jordi Munoz Gorriz*, Mireia Bargallo Gonzalez, Francesca Campabadal, Jordi Sune, Enrique A. Miranda

*Autor corresponent d’aquest treball

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Resum

Time statistics for successive breakdown (BD) events in Al2O3/HfO2-based nanolaminates aimed to the development of multilevel one-time programmable (OTP) memory cells is investigated. The clustering model is shown to account for the departure of the experimental data from the standard Weibull model attributed to the initial leakage current dispersion. An equivalent electrical circuit model is used to represent the stepwise current increase triggered by the appearance of multiple BD sites. Correlation effects in the order statistics are ascribed to a reduction of the effective stress voltage caused by the presence of a series resistance. It is shown that the E -model acceleration law for dielectric BD is consistent with the data obtained from our antifuse cells.

Idioma originalAnglès
Número d’article9239294
Pàgines (de-a)1770-1773
Nombre de pàgines4
RevistaIEEE Electron Device Letters
Volum41
Número12
DOIs
Estat de la publicacióPublicada - de des. 2020

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