AFM lithography of aluminium for fabrication of nanomechanical systems

Z.J. Davis, G. Abadal, O. Hansen, X. Borrisé, N. Barniol, F. Pérez-Murano, A. Boisen

Producció científica: Contribució a revista › Article › Recerca

Idioma original	Anglès
Pàgines (de-a)	467-472
Revista	Ultramicroscopy: journal devoted to the technical and theoretical advancement of structural research
Volum	97
Estat de la publicació	Publicada - 1 de gen. 2003

Com citar-ho

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title = "AFM lithography of aluminium for fabrication of nanomechanical systems",

author = "Z.J. Davis and G. Abadal and O. Hansen and X. Borris{\'e} and N. Barniol and F. P{\'e}rez-Murano and A. Boisen",

year = "2003",

month = jan,

day = "1",

language = "English",

volume = "97",

pages = "467--472",

journal = "Ultramicroscopy: journal devoted to the technical and theoretical advancement of structural research",

issn = "0304-3991",

publisher = "Elsevier",

}

TY - JOUR

T1 - AFM lithography of aluminium for fabrication of nanomechanical systems

AU - Davis, Z.J.

AU - Abadal, G.

AU - Hansen, O.

AU - Borrisé, X.

AU - Barniol, N.

AU - Pérez-Murano, F.

AU - Boisen, A.

PY - 2003/1/1

Y1 - 2003/1/1

M3 - Article

SN - 0304-3991

VL - 97

SP - 467

EP - 472

JO - Ultramicroscopy: journal devoted to the technical and theoretical advancement of structural research

JF - Ultramicroscopy: journal devoted to the technical and theoretical advancement of structural research

ER -