TY - JOUR
T1 - A technology for the monolithic fabrication of a pressure sensor and related circuitry
AU - Cané, C.
AU - Campabadal, F.
AU - Esteve, J.
AU - Lozano, M.
AU - Götz, A.
AU - Santander, J.
AU - Burrer, Ch
AU - Plaza, J. A.
AU - Pahun, L.
AU - Marco, S.
PY - 1995/1/1
Y1 - 1995/1/1
N2 - A simple technology for the monolithic fabrication of piezoresistive pressure sensors and signal-conditioning circuitry is presented. The proposed methodology is based on the partition of the complete process into three main blocks: pre-processing steps, related to the sensor structure, standard CMOS technology and post-processing, corresponding to wafer backside etching. The feasibility of the presented technology is demonstrated by the results obtained from the characterization of the sensor devices, circuits and sensor-circuit combination that have been designed, fabricated and tested. In addition, the results obtained from a complete set of technological test structures show no significant effect of the additional processing on the characteristics of the standard CMOS technology. © 1994, All rights reserved.
AB - A simple technology for the monolithic fabrication of piezoresistive pressure sensors and signal-conditioning circuitry is presented. The proposed methodology is based on the partition of the complete process into three main blocks: pre-processing steps, related to the sensor structure, standard CMOS technology and post-processing, corresponding to wafer backside etching. The feasibility of the presented technology is demonstrated by the results obtained from the characterization of the sensor devices, circuits and sensor-circuit combination that have been designed, fabricated and tested. In addition, the results obtained from a complete set of technological test structures show no significant effect of the additional processing on the characteristics of the standard CMOS technology. © 1994, All rights reserved.
KW - CMOS
KW - Pressure sensors
U2 - 10.1016/0924-4247(94)00876-J
DO - 10.1016/0924-4247(94)00876-J
M3 - Article
SN - 0924-4247
VL - 46
SP - 133
EP - 136
JO - "Sensors and Actuators, A: Physical"
JF - "Sensors and Actuators, A: Physical"
IS - 1-3
ER -