TY - JOUR
T1 - A platform for monolithic CMOS-MEMS integration on SOI wafers
AU - Villarroya, María
AU - Figueras, Eduard
AU - Montserrat, Josep
AU - Verd, Jaume
AU - Teva, Jordi
AU - Abadal, Gabriel
AU - Murano, Francesc Pérez
AU - Esteve, Jaume
AU - Barniol, Núria
PY - 2006/10/1
Y1 - 2006/10/1
N2 - A new platform for micro- and nano-electromechanical systems based on crystalline silicon as the structural layer in CMOS substrates is presented. This platform is fabricated using silicon on insulator (SOI) substrates, which allows the monolithic integration of the mechanical transducer on crystalline silicon while the characteristics of the structural layer are kept independent from the CMOS technology. We report the design characteristics, the fabrication process and an example of application of the CMOS SOI-MEMS platform to obtain a mass sensor based on a crystalline silicon resonating cantilever. © 2006 IOP Publishing Ltd.
AB - A new platform for micro- and nano-electromechanical systems based on crystalline silicon as the structural layer in CMOS substrates is presented. This platform is fabricated using silicon on insulator (SOI) substrates, which allows the monolithic integration of the mechanical transducer on crystalline silicon while the characteristics of the structural layer are kept independent from the CMOS technology. We report the design characteristics, the fabrication process and an example of application of the CMOS SOI-MEMS platform to obtain a mass sensor based on a crystalline silicon resonating cantilever. © 2006 IOP Publishing Ltd.
UR - https://www.scopus.com/pages/publications/33748786024
U2 - 10.1088/0960-1317/16/10/038
DO - 10.1088/0960-1317/16/10/038
M3 - Article
SN - 0960-1317
VL - 16
SP - 2203
EP - 2210
JO - Journal of Micromechanics and Microengineering
JF - Journal of Micromechanics and Microengineering
IS - 10
M1 - 038
ER -