A microcantilever mechanical antenna

© 2019 Author(s). A mechanical antenna based on the interaction of an oscillating electric field with a permanent electric charge implanted in the free end of a clamped-free beam is proposed as a miniaturized alternative to conventional electromagnetic antennas. A prototype based on a silicon nitride triangular microcantilever has been fabricated, and its response to an oscillating electric field generated by a dipole antenna has been tested. The responsivity, defined as the vibration amplitude per electric field intensity unit, has been experimentally found to be â.,œ = 0.29 nm/kV m. A figure of merit (FOM) to evaluate the power conversion efficiency per unit area of the microcantilever antenna has been defined and calculated to be FOM = 0.216% m-2.