A fast optical scanning deflectometer for measuring the topography of large silicon wafers

S. Krey, W.D. Van Amstel, J. Campos, A. Moreno, E.J. Lous

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@article{3828ba4f93314477a961bd141966d901,

title = "A fast optical scanning deflectometer for measuring the topography of large silicon wafers",

author = "S. Krey and Amstel, {W.D. Van} and J. Campos and A. Moreno and E.J. Lous",

year = "2004",

month = jan,

day = "1",

doi = "10.1117/12.559702",

language = "English",

volume = "5523",

pages = "110--120",

journal = "Proc. SPIE",

issn = "0277-786X",

number = "12",

}