3D silicon sensors: Design, large area production and quality assurance for the ATLAS IBL pixel detector upgrade

Cinzia Da Via, Maurizio Boscardin, Gian Franco Dalla Betta, Giovanni Darbo, Celeste Fleta, Claudia Gemme, Philippe Grenier, Sebastian Grinstein, Thor Erik Hansen, Jasmine Hasi, Chris Kenney, Angela Kok, Sherwood Parker, Giulio Pellegrini, Elisa Vianello, Nicola Zorzi

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