Keyphrases
Cantilever
68%
Resonator
59%
Mass Sensor
50%
Microcantilever
40%
Nanoelectromechanical Systems
40%
CMOS-MEMS
37%
Nanometer Scale
36%
On chip
32%
Si(100) Surface
31%
CMOS Technology
30%
Polysilicon
27%
Resonant Frequency
27%
Fully Integrated
26%
Energy Harvesting
25%
Energy Harvester
24%
Integrated CMOS
24%
Scanning Tunneling Microscope
24%
CMOS Circuits
23%
In Situ
23%
Nanocantilever
22%
Beam Resonators
21%
Resonant Cantilever
21%
Scanning Tunneling Microscopy
20%
Micro-electro-mechanical Systems
20%
Monolithically Integrated
19%
Standard CMOS Technology
19%
Mass Sensing
18%
Silicon Oxide
17%
Complementary Metal Oxide Semiconductor
17%
Mass Detection
17%
High Sensitivity
17%
Silicon Surface
17%
Atomic Force Microscope
17%
Crystalline Silicon
16%
Compressive Strain
15%
Clamped Beam
15%
MEMS Devices
15%
(100) Surfaces
15%
Field-induced
15%
MEMS Resonator
15%
Fabrication Methods
14%
Air Condition
14%
Circuitry
14%
Nonlinearity
14%
Nanoribbon
14%
Glycerin
14%
Monolithic Integration
14%
Ultrasensitive
14%
Atomic Force Microscopy
13%
Mass Resolution
12%
Engineering
Resonator
100%
Microelectromechanical System
94%
Harvester
39%
Energy Engineering
37%
Nanometre
35%
Scanning Tunneling Microscopy
33%
Microcantilevers
31%
Capacitive
28%
Scanning Tunneling Microscope
24%
Q Factor
23%
Lithography
22%
Electrostatic Force
21%
Resonance Frequency
19%
Electric Field
19%
Transducer
18%
Nanoelectromechanical System
18%
Polysilicon
18%
Complementary Metal-Oxide-Semiconductor
17%
Silicon Surface
16%
Crystalline Silicon
15%
Atomic Force Microscope
15%
Antenna
15%
Energy Harvesting
15%
Thin Films
15%
Monolithic Integration
14%
Glycerol
14%
Micro-Cantilevers
13%
Silicon Oxide
12%
Silicalite
12%
Evaporation Rate
12%
Tapping Mode Atomic Force Microscopy
12%
Graphene
12%
Piezoelectric
12%
Aqueous Solution
12%
Nanowire
12%
Electromechanical System
12%
Air Condition
11%
Oscillator
11%
Bistables
11%
Readout Circuit
11%
Nonlinearity
11%
Modulus of Elasticity
10%
Frequency Response
10%
Responsivity
10%
Tunnel Construction
10%
Actuation
9%
Monolayers
9%
Dipole Antenna
8%
Nanoscale
8%
Hydrofluoric Acid Solution
8%
