Keyphrases
Resonator
48%
CMOS-MEMS
42%
CMOS Technology
37%
MEMS Resonator
27%
Fully Integrated
24%
Cantilever
23%
Complementary Metal Oxide Semiconductor
23%
On chip
21%
Resonant Frequency
20%
Monolithically Integrated
20%
Beam Resonators
20%
Micro-electro-mechanical Systems
20%
Clamped Beam
20%
Polysilicon
17%
Mn12
17%
Microcantilever
17%
Mass Sensor
17%
Frequency Response
17%
Mixed Oxides
15%
Magnetocaloric Effect
15%
RF MEMS Resonator
15%
Metal Layer
14%
Integrated CMOS
12%
Air Condition
12%
Magnetic Properties
11%
Standard CMOS Technology
11%
Low Power
11%
Nanoelectromechanical Systems
11%
MEMS Oscillator
11%
MEMS Filter
10%
Filter Method
10%
Electrochemical Synthesis
10%
Magnetic Nanocomposite
10%
Cantilever Array
10%
Sensor Platform
10%
Platform-Based
10%
Entropy Variation
10%
Resonant Cantilever
10%
Spin-dependent Tunneling
10%
CMOS Integrated
10%
Attogram
10%
Electrical Characterization
10%
Fabrication Methods
9%
Tungsten
9%
CMOS Circuits
9%
Mechanical Resonator
8%
Frequency Stability
8%
Nitrate Medium
8%
Mechanical Properties
8%
Nanocantilever
8%
Engineering
Microelectromechanical System
100%
Resonator
96%
Oscillator
25%
Microcantilevers
25%
Transducer
21%
Complementary Metal-Oxide-Semiconductor
18%
Frequency Response
16%
Responsivity
15%
Amplifier
14%
Resonance Frequency
14%
Q Factor
13%
Phase Noise
13%
Capacitive
13%
Electrostatic Force
12%
Energy Engineering
10%
Bandpass Filter
10%
Harvester
10%
Nanoelectromechanical System
10%
Polysilicon
10%
Metal Layer
9%
Air Condition
9%
Nonlinearity
8%
Conveyor
6%
Pull-in Voltage
6%
High Resolution
6%
Resonant Frequency
6%
Resonant Mode
6%
Experimental Result
5%
Closed Loop
5%
Level Packaging
5%
Bifurcation Point
5%
Casimir Force
5%
Carrier Phase
5%
Nonlinear Vibration
5%
Element Array
5%
Tapping (Threads)
5%
Tunnel Construction
5%
Electret
5%
Metal Oxide Semiconductor
5%
Temperature Range
5%
Modulus of Elasticity
5%
Material Anisotropy
5%
Evaporation Rate
5%
Glycerol
5%
Mechanical Coupling
5%
Conventional Technology
5%
Etching Process
5%
Dynamic Property
5%
Phase-Inversion
5%
Balun
5%
